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Telephone: +8617349222520  

Telephone: +8613813810619  

Email: sales@kegugroup.com  

Address: Chaoyang 5th Road South Section, Weicheng Street, Qinhan New City, Xixian New District, Shaanxi Province

Semiconductor


Silicon carbide ceramic materials are well-suited for use in precision ceramic components in semiconductor equipment due to their thermal expansion coefficient matching that of silicon, wear resistance, chemical corrosion resistance, light weight, high elastic modulus, good specific stiffness, and excellent optical processing properties. Examples include silicon carbide porous vacuum chucks, silicon carbide bump chucks, silicon carbide polishing and carrier plates, silicon carbide robotic arms, crystal boats, silicon carbide guides and supports, etc.