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Contact Information
Telephone: +8617349222520
Telephone: +8613813810619
Email: sales@kegugroup.com
Address: Chaoyang 5th Road South Section, Weicheng Street, Qinhan New City, Xixian New District, Shaanxi Province
Semiconductor
Silicon carbide ceramic materials are well-suited for use in precision ceramic components in semiconductor equipment due to their thermal expansion coefficient matching that of silicon, wear resistance, chemical corrosion resistance, light weight, high elastic modulus, good specific stiffness, and excellent optical processing properties. Examples include silicon carbide porous vacuum chucks, silicon carbide bump chucks, silicon carbide polishing and carrier plates, silicon carbide robotic arms, crystal boats, silicon carbide guides and supports, etc.
