Application field
应用领域
Semiconductor
Silicon carbide ceramic materials match silicon with thermal expansion coefficient, wear resistance, chemical corrosion resistance, light weight, high elastic modulus and good specific stiffness and optical processing performance, especially suitable for the use of precision ceramic structural parts in semiconductor equipment. Such as silicon carbide porous vacuum sucker, silicon carbide convex point sucker, silicon carbide throwing disc and bearing plate, silicon carbide mechanical arm, crystal boat, silicon carbide guide rail and bracket, etc..
SHAANXI KEGU NEW MATERIAL TECHNOLOGY CO.,LTD
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