Silicon carbide porous chuck
Silicon carbide ceramics with excellent mechanical properties
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Porous suction cups
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Silicon carbide porous chuck
Silicon carbide ceramics with excellent mechanical properties, such as high strength, high hardness, high elastic modulus, good high temperature stability, such as high thermal conductivity, low thermal expansion coefficient, microporous vacuum suction cup is a variety of semiconductor manufacturing process, special tools used for adsorption of bearing, is applied to thinning, scribing, cleaning, handling, etc.
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